Polystyrene as a brush layer for directed self-assembly of block co-polymers

标题
Polystyrene as a brush layer for directed self-assembly of block co-polymers
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 110, Issue -, Pages 234-240
出版商
Elsevier BV
发表日期
2012-12-27
DOI
10.1016/j.mee.2012.12.006

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