Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic

标题
Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 97, Issue -, Pages 272-275
出版商
Elsevier BV
发表日期
2012-05-29
DOI
10.1016/j.mee.2012.04.024

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