Epitaxy of BaTiO3 thin film on Si(001) using a SrTiO3 buffer layer for non-volatile memory application

标题
Epitaxy of BaTiO3 thin film on Si(001) using a SrTiO3 buffer layer for non-volatile memory application
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 88, Issue 7, Pages 1232-1235
出版商
Elsevier BV
发表日期
2011-04-15
DOI
10.1016/j.mee.2011.03.028

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