PDMS surface modification using atmospheric pressure plasma

标题
PDMS surface modification using atmospheric pressure plasma
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2281-2285
出版商
Elsevier BV
发表日期
2011-02-22
DOI
10.1016/j.mee.2011.02.084

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