Fabrication and characterization of e-beam photoresist array for biomimetic self-cleaning dry adhesives

标题
Fabrication and characterization of e-beam photoresist array for biomimetic self-cleaning dry adhesives
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2126-2128
出版商
Elsevier BV
发表日期
2011-01-23
DOI
10.1016/j.mee.2011.01.049

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