Dielectrophoretic assembly of carbon nanotube-based NEMS devices using floating electrodes

标题
Dielectrophoretic assembly of carbon nanotube-based NEMS devices using floating electrodes
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2703-2706
出版商
Elsevier BV
发表日期
2011-02-02
DOI
10.1016/j.mee.2011.01.042

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