期刊
MICROELECTRONIC ENGINEERING
卷 88, 期 8, 页码 2513-2515出版社
ELSEVIER
DOI: 10.1016/j.mee.2011.01.015
关键词
Carbon Nanotube; Sol-Gel; Composite; Resistivity; CNT film
资金
- Korean Ministry of Education, Science and Technology [R32-2008-000-10082-0]
In this work we present a novel method for CNT/Sol-Gel film preparation, combining low resistivity and improved adhesion behaviour on glass substrates. Naturally occurring voids, with diameters of 50-100 nm, in sprayed CNT networks are used for Sol-Gel penetration via dip coating method. Thermal treatments, for composite film densification, in the range of 200-700 degrees C are investigated and electrical properties were compared to identically treated reference samples with the same batch of nanotubes but without Sol-Gel. The resistivity of such composite films, with best value of similar to 0.03 Omega cm for MWNTs, is two orders of magnitudes lower than previously reported for CNT/Sol-Gel composites. Surprisingly the surface resistance of the composite film shows 25% improvement compared to thermally equal treated pure CNT films. In addition, crosscut adhesion behaviour is investigated, including tape test, showing good performance for composite films, where Sol-Gel acts as an adhesion promoter. (C) 2011 Elsevier B.V. All rights reserved.
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