Laser-assisted patterning of solution-processed oxide semiconductor thin film using a metal absorption layer

标题
Laser-assisted patterning of solution-processed oxide semiconductor thin film using a metal absorption layer
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 88, Issue 1, Pages 6-10
出版商
Elsevier BV
发表日期
2010-08-07
DOI
10.1016/j.mee.2010.07.042

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