Fabrication for metal photomask pattern by using fountain-pen nanolithography

标题
Fabrication for metal photomask pattern by using fountain-pen nanolithography
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 910-913
出版商
Elsevier BV
发表日期
2009-12-12
DOI
10.1016/j.mee.2009.11.177

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