The sacrificial oxide etching of poly-Si cantilevers having high aspect ratios using supercritical CO2

标题
The sacrificial oxide etching of poly-Si cantilevers having high aspect ratios using supercritical CO2
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 87, Issue 9, Pages 1696-1700
出版商
Elsevier BV
发表日期
2009-12-29
DOI
10.1016/j.mee.2009.12.076

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