Texture of atomic layer deposited ruthenium - Peeref

标题

Texture of atomic layer deposited ruthenium

作者

关键词

-

出版物

MICROELECTRONIC ENGINEERING

Volume 87, Issue 10, Pages 1879-1883

出版商

Elsevier BV

发表日期

2009-11-13

DOI

10.1016/j.mee.2009.11.020

向作者/读者发起求助以获取更多资源

Protocol

Reagent

Reprint

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