Lithography guided horizontal growth of silicon nanowires for the fabrication of ultrasensitive piezoresistive strain gauges

标题
Lithography guided horizontal growth of silicon nanowires for the fabrication of ultrasensitive piezoresistive strain gauges
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 1270-1273
出版商
Elsevier BV
发表日期
2009-11-08
DOI
10.1016/j.mee.2009.10.050

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