期刊
MICROELECTRONIC ENGINEERING
卷 86, 期 4-6, 页码 1488-1490出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2008.12.002
关键词
Bragg grating; Photonic band-gap; Nano-biosensor; Lab-on-a-chip; Microfluidic; Micro total analysis systems; Optofluidic systems
A photonic wire Bragg grating structure, integrated with fluidic channels and reservoirs for fluid sensing based on refractive index changes, has been designed using 3-D Finite Domain Time Difference (FDTD) method and fabricated using electron beam lithography and reactive ion etching on an Silicon-on-Insulator (SOI) material. A scheme is developed where a Polydimethylsiloxane (PDMS) microfluidic chip is integrated with the SOI photonic chip via a reversible active sealing method. The highest sensitivity (Delta n/Delta lambda) of the device is estimated to be 5.5 x 10(-3) nm(-1) and the volume of the sensing region is approximately 2 mu m(3). This device could be a potential candidate for lab-on-a-chip devices for bio-sensing applications. (C) 2009 Elsevier B.V. All rights reserved.
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