期刊
MICROELECTRONIC ENGINEERING
卷 86, 期 4-6, 页码 1317-1320出版社
ELSEVIER
DOI: 10.1016/j.mee.2009.02.016
关键词
Wicking; MEMS; DRIE; Wet etch; Capillary flow
A variety of micro scale surface wicking structures that form open/covered post surfaces and open channels are investigated to probe the effect of the geometry, inter-connectivity, and surface porosity on the wicking efficiency of such surfaces. The surfaces are examined using a capillary rise flow experiment and the study is focused on the Lucas-Washburn flow regime in which capillary forces balance viscous forces. (C) 2009 Elsevier B.V. All rights reserved.
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