Micro-fabrication of polymeric devices using hot roller embossing

标题
Micro-fabrication of polymeric devices using hot roller embossing
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 86, Issue 4-6, Pages 933-936
出版商
Elsevier BV
发表日期
2008-12-25
DOI
10.1016/j.mee.2008.12.021

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