The progress and challenges of threshold voltage control of high-k/metal-gated devices for advanced technologies (Invited Paper)

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 86, Issue 7-9, Pages 1722-1727

出版商

Elsevier BV

发表日期

2009-03-20

DOI

10.1016/j.mee.2009.03.092

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