Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing

标题
Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 85, Issue 12, Pages 2411-2413
出版商
Elsevier BV
发表日期
2008-10-01
DOI
10.1016/j.mee.2008.09.033

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