Direct soft UV-NIL with resist incorporating carbon nanotubes - Peeref

标题

Direct soft UV-NIL with resist incorporating carbon nanotubes

作者

关键词

-

出版物

MICROELECTRONIC ENGINEERING

Volume 85, Issue 1, Pages 195-201

出版商

Elsevier BV

发表日期

2007-05-20

DOI

10.1016/j.mee.2007.05.007

向作者/读者发起求助以获取更多资源

Protocol

Reagent

Reprint

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