期刊
MICROCHIMICA ACTA
卷 166, 期 1-2, 页码 177-181出版社
SPRINGER WIEN
DOI: 10.1007/s00604-009-0166-y
关键词
Glass and silica microchip; Thermal bonding; Nanofluidics; Microfluidics
Fused silica microchips have several attractive features; they are stable, transparent and allow fabrication with immense precision, also of nanochannels, which make them good candidates for both micro- and nanofluidics. Although fused silica microchips have been around for years, the single most difficult fabrication step, thermal bonding, remains a major hurdle. However, thermal bonding can be mastered by observing some simple rules. We provide an illustrated, step-by-step guide on how to prepare glass and fused silica microchips, pointing out pitfalls and advising correct manners for successful thermal bonding.
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