Effect of scan parameters and etching temperature on low-destructive nanofabrication of quartz

标题
Effect of scan parameters and etching temperature on low-destructive nanofabrication of quartz
作者
关键词
-
出版物
Micro & Nano Letters
Volume 8, Issue 10, Pages 735-739
出版商
Institution of Engineering and Technology (IET)
发表日期
2013-10-02
DOI
10.1049/mnl.2013.0423

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