期刊
METALS AND MATERIALS INTERNATIONAL
卷 16, 期 5, 页码 773-777出版社
KOREAN INST METALS MATERIALS
DOI: 10.1007/s12540-010-1012-9
关键词
Nanostructured materials; Compounds; Sol-gel; Conductivity; Electrical resistivity
资金
- Korean Ministry of Knowledge Economy [10030406]
- Korea Institute of Industrial Technology(KITECH) [10030406] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
We fabricated a micro gas sensor for hydrogen sulfide (H2S) gas using MEMS technology and the sol-gel process, and synthesized SnO2-CuO as a sensing material by the sol-gel method. Synthesized particles of SnO2-CuO were characterized with an average particle size of about 40 nm as measured by FE-SEM imagery and XRD peaks. The sensing material was coated on the micro platform and annealed at 400 degrees C. The maximum gas sensitivity (R-s= R-g/R-a) was 0.005 at 300 degrees C for 1.0 ppm - H2S. The gas sensitivity showed linear behavior with increasing H2S concentration.
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