Structure and Electro-Optical Properties of Thin Films Grown by Alternate Atomic Layer Deposition of ZnO and Al2O3 on the Sapphire Substrate

出版年份 2010 全文链接

标题

作者

关键词

出版物

Volume 51, Issue 2, Pages 219-226

出版商

Japan Institute of Metals

发表日期

2010-01-25

DOI

10.2320/matertrans.mc200902

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