Effects of sputtering pressure on properties of copper oxide thin films prepared by rf magnetron sputtering

标题
Effects of sputtering pressure on properties of copper oxide thin films prepared by rf magnetron sputtering
作者
关键词
-
出版物
MATERIALS TECHNOLOGY
Volume 26, Issue 1, Pages 28-31
出版商
Informa UK Limited
发表日期
2012-06-24
DOI
10.1179/175355511x12941605982226

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