期刊
MATERIALS SCIENCE-MEDZIAGOTYRA
卷 17, 期 4, 页码 358-370出版社
KAUNAS UNIV TECH
DOI: 10.5755/j01.ms.17.4.770
关键词
SiOx containing diamond like carbon; diamond like nanocomposite films
资金
- European Social Fund Agency [VP1-3.1-SMM-05-K, VP1-3.1-SMM-05-K-01-003]
The present article reviews current situation on SiOx containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.
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