Surface passivation at low temperature of p- and n-type silicon wafers using a double layer a-Si:H/SiNx:H

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 159-160, Issue -, Pages 242-247

出版商

Elsevier BV

发表日期

2009-03-10

DOI

10.1016/j.mseb.2009.02.009

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