Hardness and residual stress in nanocrystalline ZrN films: Effect of bias voltage and heat treatment

标题
Hardness and residual stress in nanocrystalline ZrN films: Effect of bias voltage and heat treatment
作者
关键词
-
出版商
Elsevier BV
发表日期
2008-09-13
DOI
10.1016/j.msea.2008.09.006

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