Effect of plasma CVD operating temperature on nanomechanical properties of TiC nanostructured coating investigated by atomic force microscopy

标题
Effect of plasma CVD operating temperature on nanomechanical properties of TiC nanostructured coating investigated by atomic force microscopy
作者
关键词
-
出版物
MATERIALS RESEARCH BULLETIN
Volume 47, Issue 9, Pages 2200-2205
出版商
Elsevier BV
发表日期
2012-06-10
DOI
10.1016/j.materresbull.2012.06.003

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