Hot-wire chemical vapor deposition of WO3−x thin films of various oxygen contents

标题
Hot-wire chemical vapor deposition of WO3−x thin films of various oxygen contents
作者
关键词
-
出版物
MATERIALS CHEMISTRY AND PHYSICS
Volume 140, Issue 1, Pages 89-96
出版商
Elsevier BV
发表日期
2013-04-06
DOI
10.1016/j.matchemphys.2013.02.072

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