期刊
MATERIALS CHEMISTRY AND PHYSICS
卷 107, 期 2-3, 页码 444-448出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.matchemphys.2007.08.015
关键词
indium tin oxide; ion beam; resistivity; XRD; AFM; PES
Transparent, conducting indium tin oxide (ITO) films were deposited without intentional substrate heating on glass and polyethersulfone (PES) substrates by a magnetron sputter type negative metal ion source (MSNIS). The effect of substrate type on optical transmittance, electrical resistivity, surface morphology and roughness of the ITO film was analyzed. ITO/glass substrates show a higher optical transmittance (89%) and lower resistivity (4 x 10(-4) Omega cm) than ITO/PES (78%, 6 x 10(-4) Omega cm). X-ray diffraction (XRD) spectra indicate polycrystalline ITO films deposited on glass and amorphous ITO films on PES. Atomic force microscopy (AFM) images also indicate that ITO/glass has a lower surface roughness than ITO/PES. The values of figure of merit (T-10/R-sh) for ITO/glass (phi(TC) = 7.7 x 10(-3) Omega(-1)) are higher than ITO/PES (phi(TC) = 1.3 x 10(-3) Omega(-1)), indicating that ITO/glass achieved the best performance in this study. (c) 2007 Elsevier B.V. All rights reserved.
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