Synthesis of Multi layer Graphene Films on Copper by Modified Chemical Vapor Deposition

In this paper, large-area uniform multilayer graphene films were synthesized on copper in one growth route by modified low pressure chemical vapor deposition (LPCVD) method by introducing an assembly into the conventional LPCVD method. Scanning electronic microscopy, optical microscopy. Raman spectroscopy. ellipsometry, and transmission electron microscopy were used to characterize the graphene films The results showed that the graphene films were multilayer. And there are about six layers with good continuity and uniformity. Meanwhile, the growth mechanism was illustrated by a growth model based on the analysis of the effects of the introduced assembly on the generation of the activated carbon atoms and on the catalysis of Cu molecules.