Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam

标题
Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam
作者
关键词
Periodic surface structures, Femtosecond beam, Multilayered thin film, Surface modification
出版物
APPLIED SURFACE SCIENCE
Volume 326, Issue -, Pages 91-98
出版商
Elsevier BV
发表日期
2014-11-22
DOI
10.1016/j.apsusc.2014.10.180

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