Preparation of γ-Al2O3 films by laser chemical vapor deposition

标题

作者

关键词

Laser CVD, γ-Al, 2, O, 3, α-Al, 2, O, 3, Film, Microstructure

出版物

APPLIED SURFACE SCIENCE

Volume 340, Issue -, Pages 160-165

出版商

Elsevier BV

发表日期

2015-03-09

DOI

10.1016/j.apsusc.2015.02.196

向作者/读者发起求助以获取更多资源

Protocol

在线求助

Reagent

在线求助

Reprint

联系作者

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