Fractal characterization of the silicon surfaces produced by ion beam irradiation of varying fluences

标题
Fractal characterization of the silicon surfaces produced by ion beam irradiation of varying fluences
作者
关键词
Surface morphology, Atomic force microscopy, Autocorrelation function, Height–height correlation function, Fractal measures
出版物
APPLIED SURFACE SCIENCE
Volume 347, Issue -, Pages 706-712
出版商
Elsevier BV
发表日期
2015-05-02
DOI
10.1016/j.apsusc.2015.04.150

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