Investigation of focused ion beam induced damage in single crystal diamond tools

出版年份 2015 全文链接

标题

作者

关键词

Molecular dynamics, Focused ion beam, Irradiation damage, Amorphization, Diamond tool

出版物

APPLIED SURFACE SCIENCE

Volume 347, Issue -, Pages 727-735

出版商

Elsevier BV

发表日期

2015-04-26

DOI

10.1016/j.apsusc.2015.04.120

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