Microstructure and electrochemical properties of nitrogen-doped DLC films deposited by PECVD technique

出版年份 2015 全文链接

标题

作者

关键词

Nitrogen-doped diamond-like carbon, Bias voltage, Microstructure, Electrochemical properties

出版物

Volume 329, Issue -, Pages 281-286

出版商

Elsevier BV

发表日期

2015-01-03

DOI

10.1016/j.apsusc.2014.12.162

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