Au-PVA Nanocomposite Negative Resist for One-Step Three-Dimensional e-Beam Lithography

标题
Au-PVA Nanocomposite Negative Resist for One-Step Three-Dimensional e-Beam Lithography
作者
关键词
-
出版物
LANGMUIR
Volume 26, Issue 4, Pages 2825-2830
出版商
American Chemical Society (ACS)
发表日期
2009-11-03
DOI
10.1021/la902915n

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