Reaction Mechanism Studies on Atomic Layer Deposition of Nb2O5from Nb(OEt)5and Water

标题
Reaction Mechanism Studies on Atomic Layer Deposition of Nb2O5from Nb(OEt)5and Water
作者
关键词
-
出版物
LANGMUIR
Volume 26, Issue 2, Pages 848-853
出版商
American Chemical Society (ACS)
发表日期
2009-10-01
DOI
10.1021/la902289h

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