Ultrathin perfluoropolyether coatings for silicon wafers: a XPS study

标题
Ultrathin perfluoropolyether coatings for silicon wafers: a XPS study
作者
关键词
Silanization, Perfluoropolyether, Hydrophobic silicon, Oleophobic silicon
出版物
PROGRESS IN ORGANIC COATINGS
Volume 78, Issue -, Pages 480-487
出版商
Elsevier BV
发表日期
2014-07-16
DOI
10.1016/j.porgcoat.2014.06.014

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