Nb-B-C thin films for electrical contact applications deposited by magnetron sputtering

标题
Nb-B-C thin films for electrical contact applications deposited by magnetron sputtering
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 4, Pages 041503
出版商
American Vacuum Society
发表日期
2014-05-22
DOI
10.1116/1.4875135

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