Review
Engineering, Chemical
Sen Xiong, Xiaofeng Qian, Zhaoxiang Zhong, Yong Wang
Summary: Membrane separation plays a crucial role in providing clean water and resources, and atomic layer deposition (ALD) is an effective strategy to enhance membrane performance. ALD improves the hydrophilicity and fouling resistance of membranes, while integrating new functionalities into membrane separation.
JOURNAL OF MEMBRANE SCIENCE
(2022)
Review
Chemistry, Physical
Daniel Attila Karajz, Imre Miklos Szilagyi
Summary: This article reviews the possibilities of photocatalytically active ZnO nanomaterials synthesized using atomic layer deposition (ALD). ZnO, a widely researched photocatalytic material, is influenced by factors such as structure and morphology. The discussion includes the structural possibilities and the incorporation of other materials (such as elements, metals, or semiconductors) to form composite materials, such as ZnO/TiO2 heterostructures, polymer fibers, carbon nanomaterials (e.g. carbon nanotubes or graphene-oxide), and biomaterials.
SURFACES AND INTERFACES
(2023)
Article
Materials Science, Coatings & Films
Angel Yanguas-Gil, Joseph A. Libera, Jeffrey W. Elam
Summary: The study developed a simulation tool for self-limited processes like atomic layer deposition and etching. It was applied to cylindrical tube and wafer reactors while exploring both ideal and nonideal self-limited kinetics, with results aligning with experimental findings.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2021)
Article
Physics, Applied
Ningyu Ren, Chengjun Zhu, Renjie Li, Sayantan Mazumdar, Cong Sun, Bingbing Chen, Qiaojing Xu, Pengyang Wang, Biao Shi, Qian Huang, Shengzhi Xu, Tiantian Li, Ying Zhao, Xiaodan Zhang
Summary: Although perovskite solar cells based on SnO2 have achieved high power conversion efficiency, large-scale fabrication remains a challenge. An atomic layer deposition (ALD) process using H2O2 as an oxygen source is demonstrated, enabling low-temperature deposition and producing highly uniform films. This technology shows potential in both single junction and tandem solar cells.
APPLIED PHYSICS LETTERS
(2022)
Article
Materials Science, Multidisciplinary
Bo K. Shrewsbury, Ahmed M. Morsy, Michelle L. Povinelli
Summary: This study optimizes planar, passive thermal-regulation devices by utilizing the phase-change properties of VO2. By calculating the tunable total emittance, the study demonstrates that an optimized multilayer device using VO2, ZnSe, and Au outperforms all previous planar devices in terms of both tunable emittance and overall performance.
OPTICAL MATERIALS EXPRESS
(2022)
Article
Multidisciplinary Sciences
Zheyi Lu, Yang Chen, Weiqi Dang, Lingan Kong, Quanyang Tao, Likuan Ma, Donglin Lu, Liting Liu, Wanying Li, Zhiwei Li, Xiao Liu, Yiliu Wang, Xidong Duan, Lei Liao, Yuan Liu
Summary: A dry dielectric integration strategy enables the transfer of wafer-scale and high-kappa dielectrics on top of 2D semiconductors. An ultra-thin buffer layer is used to pre-deposit sub-3 nm thin Al2O3 or HfO2 dielectrics, which are then mechanically dry-transferred on top of MoS2 monolayers. The transferred ultra-thin dielectric film exhibits wafer-scale flatness and uniformity without any cracks, showing high capacitance, low leakage currents, and excellent transistor properties.
NATURE COMMUNICATIONS
(2023)
Article
Chemistry, Multidisciplinary
Yanling He, Abdul Khaleed, Po Shan Lo, Ishaq Ahmad, Alan Man Ching Ng, Aleksandra B. Djurisic
Summary: Iron-based materials are commonly used oxygen scavengers. The scavenger performance depends on the interplay between available surface area and scavenger composition. The combination of FeOx nanoparticles and Fe-ALD coating on MSN exhibits the best performance. When glucose-based treatment is used, Fe-ALD coating shows a high oxygen adsorption capacity of 126.8 mL/g. ALD deposition of Fe is a versatile method to introduce Fe-based scavengers onto different supports.
Article
Nanoscience & Nanotechnology
Felix Blendinger, Daniel Seitz, Andreas Ottenschlager, Monika Fleischer, Volker Bucher
Summary: TiO2 thin films deposited on PEEK using PEALD method show promising osteogenic properties, enhancing the bioactivity of the implants effectively.
ACS APPLIED MATERIALS & INTERFACES
(2021)
Review
Engineering, Manufacturing
Faiz Rahman, Julian C. Runyon
Summary: The material growth and etching processes that manipulate one atomic or molecular layer at a time have transitioned from research labs to production floors, thanks to their practicality and diverse applications. Seed layer growth and plasma-enhanced ALD are particularly important in the removal of semiconductors, metals, and dielectrics.
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
(2021)
Review
Chemistry, Multidisciplinary
Yang Zhao, Lei Zhang, Jian Liu, Keegan Adair, Feipeng Zhao, Yipeng Sun, Tianpin Wu, Xuanxuan Bi, Khalil Amine, Jun Lu, Xueliang Sun
Summary: Energy storage and conversion systems play vital roles in reducing fossil fuel usage and developing electric vehicles. ALD and MLD techniques, with precise thickness control and excellent uniformity, have emerged as powerful tools for surface and interface engineering in energy-related devices. These techniques offer great potential for the development of new materials and advancements in the field of renewable energy.
CHEMICAL SOCIETY REVIEWS
(2021)
Review
Engineering, Biomedical
V. G. DileepKumar, Mysore Santosh Sridhar, Pornanong Aramwit, Valentina K. Krut'ko, Olga N. Musskaya, Ilya E. Glazov, Narendra Reddy
Summary: Hydroxyapatite (HA or HAp) is a widely used biomaterial in bone tissue engineering with varied properties and synthesis methods. Understanding the correlation between synthesis methods and properties of HAp is essential for generating HAp with desired characteristics for specific applications. Doping HAp with minerals or bioentities has been explored to enhance its suitability for various applications.
JOURNAL OF BIOMATERIALS SCIENCE-POLYMER EDITION
(2022)
Article
Chemistry, Analytical
Chengming Lou, Chen Yang, Wei Zheng, Xianghong Liu, Jun Zhang
Summary: A highly sensitive and selective gas sensor for detecting formaldehyde was reported in this study, based on SnO2/ZnO hetemspheres designed by atomic layer deposition (ALD). The ZnO ALD significantly improved sensor properties such as higher responses, faster response-recovery dynamics and better selectivity. The study demonstrates the promising potential of ALD surface engineering for designing new materials for reliable detection of harmful molecules.
SENSORS AND ACTUATORS B-CHEMICAL
(2021)
Article
Chemistry, Physical
Chun-Yuan Wang, Chun-Yi Chou, Han-Fang Shiue, Hsing-Yang Chen, Chen-Hsiang Ling, Jing-Jong Shyue, Miin-Jang Chen
Summary: In this paper, the authors investigate a method to alter the work function of TiN thin films using atomic layer annealing (ALA) technique. The results show that by incorporating layer-by-layer atomic layer deposition cycle with argon plasma treatment, the density, stoichiometry, and crystallinity of TiN thin films can be significantly improved at a low temperature of 300 degrees C, resulting in a wide tunability of the TiN metal gate's work function.
APPLIED SURFACE SCIENCE
(2022)
Article
Materials Science, Coatings & Films
Angel Yanguas-Gil, Jeffrey W. Elam
Summary: This work explores the application of deep neural networks to optimize atomic layer deposition (ALD) processes, proposing a method based on neural networks to predict saturation times and demonstrating its feasibility. The study provides an effective approach to minimize the number of experiments required for optimizing new ALD processes and highlights the application of machine learning in thin film growth and manufacturing.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2022)
Article
Multidisciplinary Sciences
A. Yu. Mironov, D. M. Silevitch, S. V. Postolova, M. V. Burdastyh, T. Proslier, T. I. Baturina, T. F. Rosenbaum, V. M. Vinokur
Summary: The research reveals that in the proximity of the superconductor-insulator transition, TiN and NbTiN thin films exhibit self-induced electronic granularity and become random arrays of superconducting granules coupled via Josephson links. This results in a transition of the impedance from capacitive to inductive behavior, where the inductive component is due to superconducting droplets and the capacitive component is from effective Josephson junctions capacitances.
SCIENTIFIC REPORTS
(2021)
Article
Materials Science, Coatings & Films
LiAo Cao, Felix Mattelaer, Timo Sajavaara, Jolien Dendooven, Christophe Detavernier
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2020)
Article
Chemistry, Multidisciplinary
Julius de Rojas, Alberto Quintana, Aitor Lopeandia, Joaquin Salguero, Jose L. Costa-Kramer, Llibertat Abad, Maciej O. Liedke, Maik Butterling, Andreas Wagner, Lowie Henderick, Jolien Dendooven, Christophe Detavernier, Jordi Sort, Enric Menendez
ADVANCED FUNCTIONAL MATERIALS
(2020)
Article
Physics, Applied
K. van Stiphout, F. A. Geenen, N. M. Santos, S. M. C. Miranda, V Joly, J. Demeulemeester, C. Mocuta, C. M. Comrie, C. Detavernier, L. M. C. Pereira, K. Temst, A. Vantomme
Summary: The growth of thin NiSi films via thermal reaction, modifying properties of the films through substrate damage or nitrogen impurities, and the strong interwoven nature of phase formation, texture, and morphological degradation were studied. It was found that the formation temperature and texture of NiSi films can be altered by selecting appropriate implantation conditions.
JOURNAL OF PHYSICS D-APPLIED PHYSICS
(2021)
Article
Nanoscience & Nanotechnology
Ranjith K. Ramachandran, Jolien Dendooven, Christophe Detavernier
Summary: This study reports the phase and size-controlled synthesis of Fe-Pt nanoalloys using a two-step synthesis procedure, revealing the composition and structure of the nanoalloys through in situ X-ray diffraction and X-ray fluorescence measurements. By changing the total thickness of the bilayers, the size of the resulting bimetallic nanoparticles can be tuned, providing a new approach for the preparation of alloy nano materials.
Article
Chemistry, Physical
Ji-Yu Feng, Ranjith K. Ramachandran, Eduardo Solano, Matthias M. Minjauw, Michiel Van Daele, Andre Vantomme, Daniel Hermida-Merino, Alessandro Coati, Hilde Poelman, Christophe Detavernier, Jolien Dendooven
Summary: The research investigated the morphology evolution of supported palladium nanoparticles during plasma-enhanced atomic layer deposition, using palladium hexafluoroacetylacetonate as precursor. By adding cycles of a three-step process before the standard process, the initial areal density of Pd NPs increased. The use of O2 plasma exposure as an additional co-reactant also influenced the nucleation density, particle coalescence, and shape of the deposited particles. Based on the findings, a synthetic approach enabling precise control of Pd nanoparticle dimensions and coverage was developed.
APPLIED SURFACE SCIENCE
(2021)
Article
Nanoscience & Nanotechnology
Robin R. Petit, Jin Li, Babs Van de Voorde, Sandra Van Vlierberghe, Philippe F. Smet, Christophe Detavernier
Summary: Inorganic barriers grown by ALD can solve stability issues caused by foreign species permeating into polymer thin films. The infiltration of ALD species into polymers can also modify their properties. Results show that the deposition temperature and the location of functional groups in the polymer chain have the strongest influence on the infiltration behavior.
ACS APPLIED MATERIALS & INTERFACES
(2021)
Article
Materials Science, Coatings & Films
Andreas Werbrouck, Kevin van de Kerckhove, Diederik Depla, Dirk Poelman, Philippe F. Smet, Jolien Dendooven, Christophe Detavernier
Summary: Plasma species concentration increases linearly with power, and the atom-to-ion ratio increases with power and gas flow. Increased pressure can significantly reduce ion flux towards the substrate, and the formation of bubbles or blisters in films can be linked to ion-induced compressive stress.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2021)
Article
Chemistry, Applied
Bo Zhao, Jin Li, Maxime Guillaume, Jolien Dendooven, Christophe Detavernier
Summary: The study reveals that the pristine Li surface is naturally covered with an oxidized layer, which can be efficiently removed by plasma treatments to obtain different surface compositions like metallic Li, Li2O, and Li3N. Among these, the Li3N coated Li electrode shows superior stability in symmetric Li metal batteries.
JOURNAL OF ENERGY CHEMISTRY
(2022)
Article
Materials Science, Multidisciplinary
Wouter Devulder, Daniele Garbin, Sergiu Clima, Gabriele Luca Donadio, Andrea Fantini, Bogdan Govoreanu, Christophe Detavernier, Larry Chen, Michael Miller, Ludovic Goux, Sven Van Elshocht, Johan Swerts, Romain Delhougne, Gouri Sankar Kar
Summary: This paper investigates the thermal stability of a wide range of ternary and quaternary (Si)GeAsTe alloy thin films. The study shows that Si doping improves the thermal stability and capping the films with a W cap avoids material loss. An optimal chalcogenide composition of As50Te20Ge20Si10 is identified for electrical characterization.
Article
Nanoscience & Nanotechnology
Yanlu Li, Claudio Bellani, Nebiyu Yebo, Jolien Dendooven, Jin Won Seo, Christophe Detavernier, Roel Baets, Johan A. Martens, Sreeprasanth Pulinthanathu Sree
Summary: This study demonstrates the integration of nanoporous silica-alumina films on silicon nanophotonic chips for selective NH3 detection. The reversible nature of the sensor is investigated in relation to preadsorbed water vapor.
ACS APPLIED NANO MATERIALS
(2022)
Article
Chemistry, Physical
Nithin Poonkottil, Eduardo Solano, Arbresha Muriqi, Matthias M. Minjauw, Matthias Filez, Michael Nolan, Christophe Detavernier, Jolien Dendooven
Summary: Nanoscale patterning of inorganics is crucial for advanced electronic, photonic, and energy devices. In this study, the sequential infiltration synthesis (SIS) method was used to fabricate Ru metal nanostructures in polystyrene-block-polymethyl methacrylate (PS-b-PMMA) templates without any pretreatment. The selective interaction between RuO4 and the aromatic C=C and C-H groups in PS allows for the formation of Ru nanolines.
CHEMISTRY OF MATERIALS
(2022)
Article
Engineering, Electrical & Electronic
Liad Tadmor, Enrico Brusaterra, Eldad Bahat Treidel, Frank Brunner, Nicole Bickel, Sofie S. T. Vandenbroucke, Christophe Detavernier, Joachim Wuerfl, Oliver Hilt
Summary: This work investigates the properties and robustness of post metallization annealed Al2O3 atomic layers on n-type GaN in terms of chemical, physical, and electrical aspects. The study demonstrates a gate-first process flow with subsequent ohmic contact formation at temperatures up to 600 degrees C using planar metal insulator capacitors. The results show no new bonds or crystallization in the Al2O3 layer due to annealing, but degradation is observed at 600 degrees C. The annealing temperature affects the oxide depletion and deep depletion capacitances, resulting in a reduction of the flat band voltage to zero.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
(2023)
Article
Chemistry, Physical
Jolien Dendooven, Michiel Van Daele, Eduardo Solano, Ranjith K. Ramachandran, Matthias M. Minjauw, Andrea Resta, Alina Vlad, Yves Garreau, Alessandro Coati, Giuseppe Portale, Christophe Detavernier
PHYSICAL CHEMISTRY CHEMICAL PHYSICS
(2020)
Article
Chemistry, Physical
Sofie S. T. Vandenbroucke, Elisabeth Levrau, Matthias M. Minjauw, Michiel Van Daele, Eduardo Solano, Rita Vos, Jolien Dendooven, Christophe Detavernier
PHYSICAL CHEMISTRY CHEMICAL PHYSICS
(2020)
Article
Chemistry, Physical
Ji-Yu Feng, Matthias M. Minjauw, Ranjith K. Ramachandran, Michiel Van Daele, Hilde Poelman, Timo Sajavaara, Jolien Dendooven, Christophe Detavernier
PHYSICAL CHEMISTRY CHEMICAL PHYSICS
(2020)
