Atomic layer deposition of GaN at low temperatures

标题
Atomic layer deposition of GaN at low temperatures
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 1, Pages 01A124
出版商
American Vacuum Society
发表日期
2011-12-02
DOI
10.1116/1.3664102

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