Time-resolved Fourier transform infrared spectroscopy of the gas phase during atomic layer deposition

标题
Time-resolved Fourier transform infrared spectroscopy of the gas phase during atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 4, Pages 613-621
出版商
American Vacuum Society
发表日期
2010-06-25
DOI
10.1116/1.3455187

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