Fabrication of freestanding LiNbO3 thin films via He implantation and femtosecond laser ablation

标题
Fabrication of freestanding LiNbO3 thin films via He implantation and femtosecond laser ablation
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 3, Pages 462-465
出版商
American Vacuum Society
发表日期
2010-04-15
DOI
10.1116/1.3384056

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