Rapid thermal annealing of ZnO thin films grown at room temperature

标题
Rapid thermal annealing of ZnO thin films grown at room temperature
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 2, Pages 216-219
出版商
American Vacuum Society
发表日期
2010-01-20
DOI
10.1116/1.3290759

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