Chemical and structural properties of atomic layer deposited La2O3 films capped with a thin Al2O3 layer

标题
Chemical and structural properties of atomic layer deposited La2O3 films capped with a thin Al2O3 layer
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 2, Pages L1-L7
出版商
American Vacuum Society
发表日期
2009-02-28
DOI
10.1116/1.3079632

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