Auger electron spectroscopy study of reactor walls in transition from an O2 to a Cl2 plasma

标题
Auger electron spectroscopy study of reactor walls in transition from an O2 to a Cl2 plasma
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 3, Pages 515-520
出版商
American Vacuum Society
发表日期
2009-05-03
DOI
10.1116/1.3106608

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