Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach

标题
Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 1, Pages 174-183
出版商
American Vacuum Society
发表日期
2008-01-20
DOI
10.1116/1.2823491

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