Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates
出版年份 2015 全文链接
标题
Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 106, Issue 18, Pages 182601
出版商
AIP Publishing
发表日期
2015-05-05
DOI
10.1063/1.4919761
参考文献
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