期刊
出版社
ELSEVIER SCIENCE INC
DOI: 10.1016/j.precisioneng.2015.03.007
关键词
Nano Measurement Machine; Piezo-resistive effect; Traceable dimensional measurement
类别
资金
- National Key Scientific Instrument and Equipment Development Projects of China [2014YQ090709]
- Science and Technology Plan of AQSIQ of China [2013QK129]
- National Natural Science Foundation of China [51475335]
A 3D micro tactile probe based on piezo-resistive effect is developed for dimensional metrology and a detailed analysis on the hysteresis, resolution, crosstalk and uncertainty of the probe is presented. A Nano Measurement Machine (NMM) equipped with the 3D micro tactile probe is proposed as a new high precision zero-point indicator for micro- and nano-scale traceable dimensional measurement, which is calibrated according to the standard characteristic curve. In 1 mm step-height standard measurement experiment using the 3D piezo-resistive micro tactile probe, the experimental results show a standard deviation of 37 nm in the vertical tactile direction and one of 104 nm in transverse tactile direction while the standard deviation is 40 nm in the vertical direction in the 2 mm step-height standard measuring experiment. (C) 2015 Elsevier Inc. All rights reserved.
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