标题
Low stiffness tactile transducers based on AlN thin film and polyimide
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 106, Issue 16, Pages 162901
出版商
AIP Publishing
发表日期
2015-04-21
DOI
10.1063/1.4918749
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Piezoelectric ultrasonic transducer based on flexible AlN
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- Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors
- (2008) Hyung-Kew Lee et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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